Introduction to MEMS Design  --  Electrical Engineering  (EL ENG) C247B [4 units]
Course Format: Three hours of lecture and one hour of discussion per week.
Prerequisites: Graduate standing in engineering or science; undergraduates with consent of instructor.
Description: Physics, fabrication, and design of micro-electromechanical systems (MEMS). Micro and nanofabrication processes, including silicon surface and bulk micromachining and non-silicon micromachining. Integration strategies and assembly processes. Microsensor and microactuator devices: electrostatic, piezoresistive, piezoelectric, thermal, magnetic transduction. Electronic position-sensing circuits and electrical and mechanical noise. CAD for MEMS. Design project is required. Also listed as Mechanical Engineering C218.
(F,SP) Nguyen, Pister
 
Introduction to MEMS Design  --  Electrical Engineering  (EL ENG) W247B [4 units]
Course Format: Three hours of web-based lecture and one hour of web-based discussion per week.
Prerequisites: MAS-IC students only.
Formerly Electrical Engineering W245
Credit option: Students will receive no credit for EE W247B after taking EE C247B or Mechanical Engineering C218.
Description: Physics, fabrication and design of micro electromechanical systems (MEMS). Micro and nano-fabrication processes, including silicon surface and bulk micromachining and non-silicon micromachining. Integration strategies and assembly processes. Microsensor and microactuator devices: electrostatic, piezoresistive, piezoelectric, thermal, and magnetic transduction. Electronic position-sensing circuits and electrical and mechanical noise. CAD for MEMS. Design project is required.
(F,SP) Nguyen, Pister
 


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