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(from the 2011-2013 General Catalog updated as of  May 23, 2013)
Parametric and Optimal Design of MEMS  --  Electrical Engineering  (EL ENG) C246 [3 units]
Course Format: Three hours of lecture per week.
Prerequisites: Mechanical Engineering 119 and Mechanical Engineering C218/Electrical Engineering C245 are highly recommended but not mandatory.
Description: Parametric design and optimal design of MEMS. Emphasis on design, not fabrication. Analytic solution of MEMS design problems to determine the dimensions of MEMS structures for specified function. Trade-off of various performance requirements despite conflicting design requirements. Structures include flexure systems, accelerometers, and rate sensors. Also listed as Mechanical Engineering C219.
(SP) Lin, Pisano
 
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