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| Introduction to MEMS Design -- Electrical Engineering (EL ENG) C245 [4 units] | ||||
| Course Format: Three hours of lecture and one hour of discussion per week. | ||||
| Prerequisites: Graduate standing in engineering or science; undergraduates with consent of instructor. | ||||
| Description: Physics, fabrication, and design of micro-electromechanical systems (MEMS). Micro and nanofabrication processes, including silicon surface and bulk micromachining and non-silicon micromachining. Integration strategies and assembly processes. Microsensor and microactuator devices: electrostatic, piezoresistive, piezoelectric, thermal, magnetic transduction. Electronic position-sensing circuits and electrical and mechanical noise. CAD for MEMS. Design project is required. Also listed as Mechanical Engineering C218. | ||||
| (F,SP) Nguyen, Pister |
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| Introduction to MEMS Design -- Electrical Engineering (EL ENG) W245 [4 units] | ||||
| Course Format: Three hours of web-based lecture and one hour of web-based discussion per week. | ||||
| Prerequisites: MAS-IC students only. | ||||
| Credit option: Students will receive no credit for W245 after taking C245 and Mechanical Engineering C218. | ||||
| Description: Physics, fabrication and design of micro electromechanical systems (MEMS). Micro and nano-fabrication processes, including silicon surface and bulk micromachining and non-silicon micromachining. Integration strategies and assembly processes. Microsensor and microactuator devices: electrostatic, piezoresistive, piezoelectric, thermal, and magnetic transduction. Electronic position-sensing circuits and electrical and mechanical noise. CAD for MEMS. Design project is required. | ||||
| (F,SP) Nguyen,Pister |
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