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(from the 2011-2013 General Catalog updated as of  May 16, 2013)
Advanced IC Processing and Layout  --  Electrical Engineering  (EL ENG) 243 [3 units]
Course Format: Three hours of lecture per week.
Prerequisites: 143 and either 140 or 141.
Description: The key processes for the fabrication of integrated circuits. Optical, X-ray, and e-beam lithography, ion implantation, oxidation and diffusion. Thin film deposition. Wet and dry etching and ion milling. Effect of phase and defect equilibria on process control.
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